Ferroelectric PbTiO3 films grown by pulsed liquid injection metalorganic chemical vapour deposition
نویسندگان
چکیده
The influence of various deposition conditions (deposition temperature, partial oxygen pressure and solution composition) to the growth of ferroelectric PbTiO3 (PTO) films by pulsed liquid injection metalorganic chemical vapour deposition (MOCVD) was examined. Films were grown on LaAlO3 (001), SrTiO3 (001) and sapphire (R-plane) substrates. Pb(thd)2 and Ti(O i Pr)2(thd)2 (thd = 2,2,6,6-tetramethyl-3,5-heptanedionate) dissolved in toluene were used as precursors. The evolution of film composition, surface morphology and microstructure with deposition conditions was studied. The film microstructure was characterized by X-ray diffraction (XRD) in Bragg-Brentano and Schulz geometries and by Raman spectroscopy. Epitaxial films on perovskite substrates consisted of dominant c-axis and minor a-axis textured zones (c-domains and a-domains). The amount of a-domains in films depended mainly on deposition temperature. The twinning in aand c-domains was observed and twinning (tilt) angles depended on deposition conditions and substrate. Fully twinned or partially twinned films were obtained in varying deposition conditions. The best quality epitaxial films were obtained on SrTiO3 and LaAlO3 at 650 °C. Films on sapphire were mainly polycrystalline.
منابع مشابه
(001)-oriented PbTiO3 ferroelectric thin films grown on by metal-organic chemical vapour deposition
PbTiOs ferroelectric thin films have been prepared on Si (001) by metal-organic chemical vapour deposition. The ai-grown films Were characterized by scanning electmn microscopy, x-ray diffraction and Raman spectroscopy. It is shown that the films were highly (001) oriented and had essentially the same lanice constants as the bulk single crystal. However, the %-grown films were subject to intern...
متن کاملInvestigation of thickness-dependent stress in PbTiO3 thin films
X-ray diffraction (XRD) and Raman spectroscopy were used to investigate stress dependence on thickness in PbTiO3 (PTO) films grown by pulsed liquid injection Metalorganic Chemical Vapor Deposition on a LaAlO3 (001) substrate (LAO). Films on sapphire substrate (R-plane) were used as polycrystalline film reference. Epitaxial PTO films with a dominant c-domain structure are grown on LAO substrate ...
متن کاملProbing the polarity of ferroelectric thin films with x-ray standing waves
An x-ray-diffraction method that directly senses the phase of the structure factor is demonstrated and used for determining the local polarity of thin ferroelectric films. This method is based on the excitation of an x-ray standing-wave field inside the film as a result of the interference between the strong incident x-ray wave and the weak kinematically Bragg-diffracted x-ray wave from the fil...
متن کاملA novel hybrid pulsed laser deposition/metalorganic vapour deposition method to form rare-earth activated GaN
A novel low-temperature method based on a combination of pulsed laser deposition and metalorganic chemical vapour deposition was used to fabricate GaN thin films doped with rare-earth (RE) ions. The films were deposited on GaN/Al2O3 substrates. The x-ray diffraction analysis of these GaN : RE (RE = Eu, Tb) samples showed that the films have the hexagonal phase of GaN and are polycrystalline wit...
متن کاملCharacterization of ZnO Thin Films Grown on c-Sapphire by Pulsed Laser Deposition as Templates for Regrowth of ZnO by Metal Organic Chemical Vapor Deposition
The use of ZnO template layers grown Pulsed Laser Deposition (PLD) has been seen to produce dramatic improvements in the surface morphology, crystallographic quality and optical properties of ZnO layers grown on c-sapphire substrates by Metal Organic Chemical Vapor Deposition. This paper provides complementary details on the PLD-grown ZnO template properties.
متن کامل